LIBRA
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Modified PTFE membrane
    

LIBRA series cartridge is an advanced hydrophilic PTFE filter element, made of high-purity materials and washed with ultrapure water. It is specially designed to purify electronic chemicals for wafer cleaning, such as the critical water-based Cleaning agents SC-1, SC-2 and SPM etc.

 

Product Features:

High-purity PTFE

Suitable for high temperature and high pressure environ­ment

High flow, low D.P.

Manufactured in a dust-free environment

100% Integrity Test

Max. Operating Temp.:

170°C / 338°F

Max. flow D.P.:

0.59 MPa@50℃ / 85 psid@120°F

50% HF filtration / Varies solvent & Acid solution

 

 

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