Modified PTFE membrane
LIBRA series cartridge is an advanced hydrophilic PTFE filter element, made of high-purity materials and washed with ultrapure water. It is specially designed to purify electronic chemicals for wafer cleaning, such as the critical water-based Cleaning agents SC-1, SC-2 and SPM etc.
Product Features:
■ High-purity PTFE
■ Suitable for high temperature and high pressure environment
■ High flow, low D.P.
■ Manufactured in a dust-free environment
■ 100% Integrity Test
Max. Operating Temp.:
170°C / 338°F
Max. flow D.P.:
0.59 MPa@50℃ / 85 psid@120°F
50% HF filtration / Varies solvent & Acid solution