Gasfil series ultra-pure gas filter, adopting all 316L stainless steel structure, is specially designed for the in-line filtration application of ultra-high-purity gas in semiconductor manufacturing process, and the filtration accuracy can reach 0.003μm. It is ideal for high temperature and dynamic high pressure applications.

Product Features

• All 316L SS construction

• Ultra-high particle interception efficiency, high flux, low resistance

• Suitable for high temperature applications

• Compact structure

• Suitable for a variety of process gases

• Manufactured in a dust-free environment

• 100% integrity tested

• 100% helium leak tested