GIST ultra-pure gas filter is specially developed and designed for the purification of electronic-grade ultra-pure gas, filtration precision can be 3nm. The equipment has compact structure and high strength, it is also suitable for filtering various high temperature and high pressure gas.
Product Features:
■ SS316L electronic grade polished housing
■ High flux and low pressure loss
■ Excellent chemical compatibility
■ High temperature and high pressure
■ 100% Integrity Test
■ 100% Helium gas leak test
■ Clean room manufacturing and packaging
Max. operation pressure: 52 Bar@80℃
Max. allowable D.P.:
Flow direction: 7 bar / 21°C
Reverse Flow: 3.4 bar / 21°C