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GIST ultra-pure gas filter is specially developed and designed for the purification of electronic-grade ultra-pure gas, filtration precision can be 3nm. The equipment has compact structure and high strength, it is also suitable for filtering various high temperature and high pressure gas.

 

Product Features:

SS316L electronic grade polished housing

High flux and low pressure loss

Excellent chemical compatibility

High temperature and high pressure

100% Integrity Test

100% Helium gas leak test

Clean room manufacturing and packaging

Max. operation pressure: 52 Bar@80℃

Max. allowable D.P.:

Flow direction: 7 bar / 21°C

Reverse Flow: 3.4 bar / 21°C

 

 

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