Semiconductor manufacturing processes has high requirements for their precision production equipment and complex processes, with ever increasing demands of their ultrapure water system.
Semiconductor industries use ultrapure water mainly through these four processes: primary processing, reverse osmosis (RO), electrodeionization (EDI) and polishing. In some semiconductor plants, mixed ion exchange beds are used instead of EDI due to the raw water quality and industrial requirements to remove weak electrolytes.
Multi-media Filter + Activated Carbon Filter
Coarse Filter + Ultrafiltration Device
Reverse Osmosis System
EDI and CEDI modules