Ultrapure Water Processing
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Process Description

 

Semiconductor manufacturing processes has high requirements for their precision production equipment and complex processes, with ever increasing demands of their ultrapure water system. 


Semiconductor industries use ultrapure water mainly through these four processes: primary processing, reverse osmosis (RO), electrodeionization (EDI) and polishing. In some semiconductor plants, mixed ion exchange beds are used instead of EDI due to the raw water quality and industrial requirements to remove weak electrolytes.
 

 

Product Features

 

 

Applicable Products

Multi-media Filter + Activated Carbon Filter
Coarse Filter + Ultrafiltration Device

Reverse Osmosis System

EDI and CEDI modules

 

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